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Large-scale application of MayAir fan filter units witnesses the growth of China's semiconductor industry

Technical features: low noise, high efficiency, low energy consumption operation, group control system, long service life.

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Semiconductor line width

企業服務

5nm processing requires

cleanliness ISO Class 1

企業服務

Circuit corrosion problems

caused by "acidic" gases

企業服務

T-topping problems caused

by "alkaline" gases

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The large-scale application of MayAir FFU witnesses the growth of China’s semiconductor industry

Technical features: low noise, high efficiency, low energy consumption, group control system, long service life.

美埃(中國)環境科技股份有限公司

FFU

美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司

EFU

美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司

Airborne Molecular Contamination Control Technology Helps Improve Semiconductor Yield Rate 

With the reduction of the key line width of semiconductor chips and the continuous improvement of the technology involved in processing these chips, the control technology of Airborne Molecular Contamination (AMC) has grown in importance to improve the semiconductor yield rate. Since 2005, MayAir's Gas Filtration Solutions has been serving the wafer fabs in mainland China. Apart from supplying chemical filter products to its customers, the Company also boost a chemical laboratory in its R&D Centre in Nanjing to better serve its clients. A stringent process is used to inspect and test in each stage from raw materials used to finished products. Once the products are delivered to the customer's site, air samples are taken to verify that the installation meets the requirements. Regular visits to the customer's site to conduct review tests are a hallmark of our top-notch aftersales service.

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FFU用闆式離子交換纖維化學過濾器Puro-F

Panel type ion exchange fiber chemical filter Puro-F

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Panel type modified activated carbon chemical filter Puro-P

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Box type activated carbon chemical filter Puro-C

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Single flange V-type ion exchange fiber chemical filter Puro-V

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Carbon cartridge chemical filter CT

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Non flange ion exchange resin chemical filter Puro-V

MayAir grows together with China's semiconductor industry

Case studies

業務範圍

SMIC (Shanghai) 14nm process announced that the yield has reached the mass production level of the industry

業務範圍

Chongqing Huike 8.6-generation ultra-high-definition display device line announced a yield rate of 98.5%

業務範圍

Shanghai Microelectronics lithography equipment cleanliness fulfilled ISO Class 1

業務範圍

Huaxing Optoelectronics G11 project won LEED platinum certification

業務範圍

MayAir is the first supplier selected to replace foreign brands by BOE Technology Group

業務範圍

Hua Hong's proprietary technology of 28 nanometers. The company is currently working to achieve another breakthrough to reach 14 nanometers.

Large-scale high-speed group control system

Monitoring>100,000 unit FFUs丨Remote fault feedback <8 seconds丨Compatible with AC and DC fans丨Compatible with multiple communication protocols丨Automatic configuration technology丨Wireless control technology 丨Optimized vector pulse width modulation low harmonic technology

美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司
美埃(中國)環境科技股份有限公司

CFD simulation

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